Robust Design and Performance Verification of an In-Plane XYθ Micro-Positioning Stage
- Robust Design and Performance Verification of an In-Plane XYθ Micro-Positioning Stage
- 황동현; Byun, Jungwoong; Jeong, Jaehwa; Lee, Moon G.
- Cymbal mechanism; in-plane XYθ stage; robust
design; aguchi Design
of Experiments (DOE); Scott-Russell linkage mechanism (SRLM)
- Issue Date
- IEEE transactions on nanotechnology
- VOL 10, NO 6, 1412-1423
- This paper describes the robust design, fabrication, and performances verification of a novel ultraprecision XYθ micropositioning stage with piezoelectric actuator and flexure mechanism. The main goal of the proposed novel design is to combine a translational motion part and rotational motion part as a decoupled serial kinematics on a same plane. Proposed compound cymbal mechanisms of the translational motion part have functions of motion amplifier as well as motion guide. And Scott–Russell linkage mechanism is applied to the rotational motion part. In this research, Taguchi Design of Experiments is used for robust design with flexure notch hinge fabrication errors as noise factors. Target
specifications of the design are sufficient range and bandwidth of motion. The proposed XYθ stage has a translational motion range of 58.0 μmand rotational motion range of 1.05 mrad, and a closedloop resolution of±2.5 nm,±2.5 nm, and±0.25μrad inX-, Y-, and θ-directional motion, respectively. The proposed XYθ micropositioning stage has a novelty with in-plane and decoupled kinematic
design, compared with many previously developed stages based on planar parallel kinematics.
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