Robust Design and Performance Verification of an In-Plane XYθ Micro-Positioning Stage

Title
Robust Design and Performance Verification of an In-Plane XYθ Micro-Positioning Stage
Authors
황동현Byun, JungwoongJeong, JaehwaLee, Moon G.
Keywords
Cymbal mechanism; in-plane XYθ stage; robust design; aguchi Design of Experiments (DOE); Scott-Russell linkage mechanism (SRLM)
Issue Date
2011-11
Publisher
IEEE transactions on nanotechnology
Citation
VOL 10, NO 6, 1412-1423
Abstract
This paper describes the robust design, fabrication, and performances verification of a novel ultraprecision XYθ micropositioning stage with piezoelectric actuator and flexure mechanism. The main goal of the proposed novel design is to combine a translational motion part and rotational motion part as a decoupled serial kinematics on a same plane. Proposed compound cymbal mechanisms of the translational motion part have functions of motion amplifier as well as motion guide. And Scott–Russell linkage mechanism is applied to the rotational motion part. In this research, Taguchi Design of Experiments is used for robust design with flexure notch hinge fabrication errors as noise factors. Target specifications of the design are sufficient range and bandwidth of motion. The proposed XYθ stage has a translational motion range of 58.0 μmand rotational motion range of 1.05 mrad, and a closedloop resolution of±2.5 nm,±2.5 nm, and±0.25μrad inX-, Y-, and θ-directional motion, respectively. The proposed XYθ micropositioning stage has a novelty with in-plane and decoupled kinematic design, compared with many previously developed stages based on planar parallel kinematics.
URI
http://pubs.kist.re.kr/handle/201004/51043
ISSN
1536125X
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KIST Publication > Article
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