Fabrication of MoS2 few-layer by Off-axis sputtering

Title
Fabrication of MoS2 few-layer by Off-axis sputtering
Authors
오태경민형섭이교섭전형탁이전국
Keywords
MoS2; 2-D material; thin film; sputtering; annealing
Issue Date
2015-10
Publisher
International conference of advanced materials (IUMRS-ICAM 2015)
URI
http://pubs.kist.re.kr/handle/201004/51079
Appears in Collections:
KIST Publication > Conference Paper
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