Deterministic Estimation of Stripe Type Defects and Reconstruction of Mask Pattern in LS Type Mask Inspection

Title
Deterministic Estimation of Stripe Type Defects and Reconstruction of Mask Pattern in LS Type Mask Inspection
Authors
Wooshik Kim박민철
Keywords
Deterministic; Estimation; Defects; Mask; Inspection
Issue Date
2015-12
Publisher
Journal of the Optical Society of Korea
Citation
VOL 19, NO 6, 619-628
Abstract
In this paper, we consider a method for estimating a stripe-type defect and the reconstruction of a defect-free L/S type mask used in lithography. Comparing diffraction patterns of defected and defect-free masks, we derive equations for the estimation of the location and size of the defect. We construct an analytical model for this problem and derive closed form equations to determine the location and size using phase retrieval problem solving techniques. Consequently, we develop an algorithm that determines a defect-free mask pattern. An example shows the validity of the equations.
URI
http://pubs.kist.re.kr/handle/201004/58667
ISSN
12264776
Appears in Collections:
KIST Publication > Article
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