Metal-oxide Thin-film Transistor-based pH Sensor with a Silver Nanowire Top
- Metal-oxide Thin-film Transistor-based pH Sensor with a Silver Nanowire Top
- 유태희; 상병인; 왕병용; 임대순; 강현욱; 최원국; 오영제; 황도경
- InGaZnO; thin-film transistors; pH Sensor; Silver Nanowire
- Issue Date
- Journal of the Korean Physical Society
- VOL 68, NO 7, 901-907
- Amorphous InGaZnO (IGZO) metal-oxide-semiconductor thin-film transistors (TFTs) are one of the most promising technologies to replace amorphous and polycrystalline Si TFTs. Recently, TFT-based sensing platforms have been gaining significant interests. Here, we report on IGZO transistor-based pH sensors in aqueous medium. In order to achieve stable operation in aqueous environment and enhance sensitivity, we used Al2O3 grown by using atomic layer deposition (ALD) and a porous Ag nanowire (NW) mesh as the top gate dielectric and electrode layers, respectively. Such devices with a Ag NW mesh at the top gate electrode rapidly respond to the pH of solutions by shifting the turn-on voltage. Furthermore, the output voltage signals induced by the voltage shifts can be directly extracted by implantation of a resistive load inverter.
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