Metal-oxide Thin-film Transistor-based pH Sensor with a Silver Nanowire Top Gate Electrode

Title
Metal-oxide Thin-film Transistor-based pH Sensor with a Silver Nanowire Top Gate Electrode
Authors
유태희상병인왕병용임대순강현욱최원국오영제황도경
Keywords
InGaZnO; thin-film transistors; pH Sensor; Silver Nanowire
Issue Date
2016-04
Publisher
Journal of the Korean Physical Society
Citation
VOL 68, NO 7, 901-907
Abstract
Amorphous InGaZnO (IGZO) metal-oxide-semiconductor thin-film transistors (TFTs) are one of the most promising technologies to replace amorphous and polycrystalline Si TFTs. Recently, TFT-based sensing platforms have been gaining significant interests. Here, we report on IGZO transistor-based pH sensors in aqueous medium. In order to achieve stable operation in aqueous environment and enhance sensitivity, we used Al2O3 grown by using atomic layer deposition (ALD) and a porous Ag nanowire (NW) mesh as the top gate dielectric and electrode layers, respectively. Such devices with a Ag NW mesh at the top gate electrode rapidly respond to the pH of solutions by shifting the turn-on voltage. Furthermore, the output voltage signals induced by the voltage shifts can be directly extracted by implantation of a resistive load inverter.
URI
http://pubs.kist.re.kr/handle/201004/58877
ISSN
03744884
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