Technical Overview on the Electron Backscattered Diffraction Sample Preparation
- Title
- Technical Overview on the Electron Backscattered Diffraction Sample Preparation
- Authors
- 김동익; 김주헌; 김병규
- Keywords
- Electron backscattered diffraction; Sample preparation; Mechanical polishing; Electro-chemical polishing; Ion milling
- Issue Date
- 2015-12
- Publisher
- Applied Microscopy
- Citation
- VOL 45, NO 4, 218-224
- Abstract
- A technical overview on the various sample preparation methods for electron backscattered
diffraction (EBSD) analysis is carried out. The mechanical polishing with colloidal silica fi nish, electro-chemical polishing, dual layer coating and ion beam milling are introduced for the common sample preparation methods for EBSD observation and some issues that are frequently neglected by the common EBSD users but should be considered to get a reliable EBSD data are discussed. This overview would be especially helpful to the people who know what EBSD technique is but do not get a reliable EBSD data because of diffi culties in sample preparation.
- URI
- http://pubs.kist.re.kr/handle/201004/59105
- ISSN
- 22875123
- Appears in Collections:
- KIST Publication > Article
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