Al-Si-N/a-SiN:H Thin-Film Coating for Polycarbonate Glazing Applications

Title
Al-Si-N/a-SiN:H Thin-Film Coating for Polycarbonate Glazing Applications
Authors
김영우임상호김동환한승희안세훈이근혁장성우
Keywords
Al-Si-N; sputtering; optical properties; hardness test
Issue Date
2016-05
Publisher
Metals and Materials International
Citation
VOL 22, NO 3, 535-543
URI
http://pubs.kist.re.kr/handle/201004/59529
ISSN
15989623
Appears in Collections:
KIST Publication > Article
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