Performance Analysis and Design of FET-Embedded Capacitive Micromachined Ultrasonic Transducer

Title
Performance Analysis and Design of FET-Embedded Capacitive Micromachined Ultrasonic Transducer
Authors
이병철황교선김진식정승근유현용
Keywords
CMUT; FET; High frequency; 3-D FEA simulation
Issue Date
2016-09
Publisher
IEEE International Ultrasonics Symposium 2016
Citation
, 1-4
URI
http://pubs.kist.re.kr/handle/201004/60011
Appears in Collections:
KIST Publication > Conference Paper
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