Accurate characterization of mask defects by combination of phase retrieval and deterministic approach

Title
Accurate characterization of mask defects by combination of phase retrieval and deterministic approach
Authors
박민철송진동티보르펄티에김우식
Keywords
Mask; Defect; Phase; Retrieval; Deterministic
Issue Date
2016-10
Publisher
Optical engineering
Citation
VOL 55, NO 10, 103105-1-103105-8
URI
http://pubs.kist.re.kr/handle/201004/60226
ISSN
00913286
Appears in Collections:
KIST Publication > Article
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