Large area carbon membrane splitting from single diamond bulk substrate by using carbon and hydrogen co-implantation

Title
Large area carbon membrane splitting from single diamond bulk substrate by using carbon and hydrogen co-implantation
Authors
문성욱송종한임원철김준곤윤지원석재권이재용
Issue Date
2016-08
Publisher
International Vacuum Congress (IVC-20)
URI
http://pubs.kist.re.kr/handle/201004/60422
Appears in Collections:
KIST Publication > Conference Paper
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