Ultra-Thin Body Ge(110)-OI on Si fabrication from Ge/AlAs/GaAs Substrate via wafer bonding technology

Title
Ultra-Thin Body Ge(110)-OI on Si fabrication from Ge/AlAs/GaAs Substrate via wafer bonding technology
Authors
김형준김상현한재훈김성광김한성임형락심재필주건우
Keywords
Ge; wafer bonding; ultra thin body
Issue Date
2018-02
Publisher
한국반도체학술대회
URI
http://pubs.kist.re.kr/handle/201004/61501
Appears in Collections:
KIST Publication > Conference Paper
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