Direct Measurements of Half-Cycle Reaction Heats during Atomic Layer Deposition by Calorimetry

Title
Direct Measurements of Half-Cycle Reaction Heats during Atomic Layer Deposition by Calorimetry
Authors
김인수J. M. LownsburyJ. A. GladdenC. T. CampbellA. B. F. Martinson
Issue Date
2017-10
Publisher
Chemistry of materials
URI
http://pubs.kist.re.kr/handle/201004/61625
ISSN
08974756
Appears in Collections:
KIST Publication > Article
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