고차조화파 생성 기반의 Coherent EUV 광원 개발 및 출력 특성

Title
고차조화파 생성 기반의 Coherent EUV 광원 개발 및 출력 특성
Authors
전영민박민철박한용김용수김영희성하민김점술이주한
Keywords
EUV; 고차조화파; coherent
Issue Date
2016-02
Publisher
Korean Conference on Semiconductors (KCS2016)
Citation
VOL WP1-17
URI
http://pubs.kist.re.kr/handle/201004/64975
Appears in Collections:
KIST Publication > Conference Paper
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