Nanocolumnar Composite Microstructure of Superhard SiC Thin Film Deposited Using Unbalanced Magnetron Sputtering Method

Title
Nanocolumnar Composite Microstructure of Superhard SiC Thin Film Deposited Using Unbalanced Magnetron Sputtering Method
Authors
이욱성백영준박종극채기웅배경은
Keywords
SiC
Issue Date
2016-07
Publisher
Advanced engineering materials
Citation
VOL 18, NO 7-1126
URI
http://pubs.kist.re.kr/handle/201004/65168
ISSN
1438-1656
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE