Superhad SiC thin film deposited by UBM sputtering method

Title
Superhad SiC thin film deposited by UBM sputtering method
Authors
이욱성백영준박종극심용섭임관원허주열이재훈
Issue Date
2016-09
Publisher
PSE2016
URI
http://pubs.kist.re.kr/handle/201004/65169
Appears in Collections:
KIST Publication > Conference Paper
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