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dc.contributor.author이욱성-
dc.contributor.author백영준-
dc.contributor.author박종극-
dc.contributor.author심용섭-
dc.contributor.author임관원-
dc.contributor.author허주열-
dc.contributor.author이재훈-
dc.date.accessioned2021-06-09T04:17:18Z-
dc.date.available2021-06-09T04:17:18Z-
dc.date.issued2016-09-
dc.identifier.other47950-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/65169-
dc.publisherPSE2016-
dc.titleSuperhad SiC thin film deposited by UBM sputtering method-
dc.typeConference Paper-
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KIST Publication > Conference Paper
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