Fabrication of suspended fully metallic ultra-small capacitance nano-junctions

Title
Fabrication of suspended fully metallic ultra-small capacitance nano-junctions
Authors
김철기김현석박종후Robert H. Blick
Keywords
nanoscale; metal-insulator-metal junction; fabrication
Issue Date
2010-06
Publisher
physica status solidi (RRL) - Rapid Research Letters
Citation
VOL 4, NO 5-6-117
Abstract
We demonstrate the fabrication of freely suspended metallic islands using an SF(6) etching and deposition technique. The resulting structure consists of nanoscale islands connected to source and drain contacts by thin CF(2) layers. This enables operation of the suspended island as a coupled metal insulator metal (MIM) junction with application as ultra-sensitive nano-diodes.
URI
http://pubs.kist.re.kr/handle/201004/66045
ISSN
1862-6254
Appears in Collections:
KIST Publication > Article
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