Correlation of oxygen vacancies to various properties of amorphous zinc tin oxide films

Title
Correlation of oxygen vacancies to various properties of amorphous zinc tin oxide films
Authors
채근화Jitendra Pal SinghNark-Eon SungHan-Koo LeeIk-Jae Lee
Keywords
Amorphous ZnO; Oxygen vacancies; X-ray photoemission spectroscopy; NEXAFS; ultraviolet photoelectron spectroscopy
Issue Date
2017-08
Publisher
Journal of applied physics
Citation
VOL 122, NO 8-085304-5
Abstract
Amorphous ZnO-SnO2 (a-ZTO) films were deposited on quartz substrates at working pressures of 5 <= P-W <= 12 mTorr using radio frequency sputtering. PW affected the occurrence of oxygen deficiencies in the films. X-ray photoemission spectroscopy, near edge X-ray absorption fine structure (NEXAFS), and ultraviolet photoelectron spectroscopy-based spectroscopy analyses showed that oxygen vacancies (OVs) influence the evolution of the optical and electrical properties of a-ZTO films. NEXAFS reflects the onset of OVs. Low P-W contributes to the evolution of a chemical structure with numerous OVs. This result can be applied to improve the electro-optical properties of a-ZTO films. As P-W decreased, the carrier concentration increased, carrier mobility increased, and film resistivity decreased. Average optical transmittance in the visible region was >90%, and increased as P-W decreased.
URI
http://pubs.kist.re.kr/handle/201004/66182
ISSN
0021-8979
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KIST Publication > Article
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