Electrical and Optical Investigation of the Growth Behavior of Au Nanoparticles Fabricated on Various Matrix Materials by the Alternating Sputtering Method

Title
Electrical and Optical Investigation of the Growth Behavior of Au Nanoparticles Fabricated on Various Matrix Materials by the Alternating Sputtering Method
Authors
이경석김범준김현철박종건
Keywords
Metal-dielectric nanocomposite film; alternating sputtering; localized surface plasmon resonance; growth of Au nanoparticles
Issue Date
2017-10
Publisher
대한금속 . 재료학회지; Korean journal of metals and materials
Citation
VOL 55, NO 10-744
Abstract
Nanocomposite films, which are comprised of metal nanoparticles dispersed in a matrix layer, have attracted great interest due to their unique electrical and optical properties, which are mainly due to the excitation of localized surface plasmons. In this study, we employed an alternating sputtering method to fabricate such nanocomposite films. We then systematically investigated the effect of SiO2, (Ba,Sr)TiO2, and Si matrix materials on the growth behavior of Au nanoparticles and their geometric distribution, which strongly affects their plasmonic properties, using both electrical and optical means. From the results, we suggest an effective way of monitoring the growth stages of Au nanoparticles and adjusting their geometric distribution to a desired form, by properly selecting the combination of materials and process controls.
URI
http://pubs.kist.re.kr/handle/201004/66288
ISSN
1738-8228
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KIST Publication > Article
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