Downsizing gas sensors based on semiconducting metal oxide: Effects of electrodes on gas sensing properties
- Downsizing gas sensors based on semiconducting metal oxide: Effects of electrodes on gas sensing properties
- 김진상; 강종윤; 김상태; 심영석; 한수덕; 노명섭; 송영근; 문희규; 이광재; 이해룡; 주병권
- Internet of things; Miniaturization; Gas sensor; Interdigitated electrodes; In2O3 nanocolumn
- Issue Date
- Sensors and actuators. B, Chemical
- VOL 248-956
- We report the highly sensitive and selective downsized gas sensors for the IoT application. Sensing areas of Pt-interdigitated electrodes (IDEs) were varied to investigate the relation between sensing materials and electrodes. In2O3 nanocolumns were deposited on the pre-patterned Pt IDEs using glancing angle deposition (GLAD). The effect of the interface resistance between electrodes and sensing materials, and the intergrain resistance between nanocolumns is analyzed by linear regression at different sensing area and incident angle of GLAD. In2O3 (angle: 85°, sensing area: 0.3 mm × 0.3 mm) nanocolumns with double Schottky barriers show the highest response and selectivity with fast response time of 10 s to VOCs among the samples fabricated in this study. The analysis reveals that the intrinsic response of In2O3 (angle: 85°, sensing area: 0.3 mm × 0.3 mm) nanocolumns are dominantly affected by intergrain resistance, resulting in a high response. Our demonstration for the fundamental aspect of downsizing gas sensor makes an important contribution to the chemical sensor field with broad interest.
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