Thin body n- and p-GaAs FET on Si for CMOS integration

Title
Thin body n- and p-GaAs FET on Si for CMOS integration
Authors
김형준김상현심재필주건우김한성김성광
Keywords
GaAs; MOSFET; CMOS; wafer bonding
Issue Date
2017-11
Publisher
The 4th International Conference on Advanced Electromaterials 2017
URI
http://pubs.kist.re.kr/handle/201004/66847
Appears in Collections:
KIST Publication > Conference Paper
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