Low temperature-grown KNbO3 thin films and their application to piezoelectric nanogenerators and self-powered ReRAM device

Title
Low temperature-grown KNbO3 thin films and their application to piezoelectric nanogenerators and self-powered ReRAM device
Authors
강종윤이태호황현규장성훈왕건욱한성범김동희남산
Keywords
Low temperature-grown KNbO3; Nanocrystal; Nanogenerator; ReRAM; Selfpowered
Issue Date
2017-12
Publisher
ACS Applied Materials & Interfaces
Citation
VOL 9, NO 49-43229
Abstract
Amorphous KNbO3 (KN) film containing KN nanocrystals was grown on TiN/SiO2/Si substrate at 350 degrees C. This KN film showed a dielectric constant (epsilon(r)) and a piezoelectric strain constant (d(33)) of 43 and 80 pm/V at 10 V, respectively, owing to the existence of KN nanocrystals. Piezoelectric nanogenerators (PNGs) were fabricated using KN films grown on the TiN/polyimide/poly(ethylene terephthalate) substrates. The PNG fabricated with the KN film grown at 350 degrees C showed an open-circuit output voltage of 2.5 V and a short-circuit current of 70 nA. The KN film grown at 350 degrees C exhibited a bipolar resistive switching behavior with good reliability characteristics that can be explained by the formation and rupture of the oxygen vacancy filaments. The KN resistive random access memory device powered by the KN PNG also showed promising resistive switching behavior. Moreover, the KN film shows good biocompatibility. Therefore, the KN film can be used for self-powered biomedical devices.
URI
http://pubs.kist.re.kr/handle/201004/66929
ISSN
1944-8244
Appears in Collections:
KIST Publication > Article
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