Ultra-Low Resonant Piezoelectric MEMS Energy Harvester With High Power Density

Title
Ultra-Low Resonant Piezoelectric MEMS Energy Harvester With High Power Density
Authors
강종윤송현철Prashant KumarDeepam MauryaMin-Gyu KangWilliam T. Reynolds정대용Shashank Priya
Keywords
Energy harvesting; low resonance frequency; piezoelectric film; spiral structure
Issue Date
2017-12
Publisher
Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems
Citation
VOL 26, NO 6-1264
Abstract
We demonstrate a microscale vibration energy harvester exhibiting an ultra-low resonance frequency and high power density. A spiral shaped microelectromechanical system (MEMS) energy harvester was designed to harvest ambient vibrations at a low frequency (<200 Hz) and acceleration (<0.25 g). High quality Pb(Zr0.48Ti0.52)O3 (PZT) film with 1.8 μm-thickness exhibiting remanent polarization of 36.2 μC/cm2 and longitudinal piezoelectric constant of 155 pm/V was synthesized to achieve high efficiency mechanical to electrical conversion. The experimental results demonstrate an ultra-low natural frequency of 48 Hz for MEMS harvester. This is one of the lowest resonance frequency reported for the piezoelectric MEMS energy harvester. Further, the position of the natural frequency was controlled by modulating the number of spiral turns and weight of the proof mass. The vibration mode shape and stress distribution were validated through a finite element analysis. The maximum output power of 23.3 nW was obtained from the five turns spiral MEMS energy harvester excited at 0.25 g acceleration and 68Hz. The normalized area and the volumetric energy density were measured to be 5.04 × 10&#8722; 4 μW/mm2 · g2 · Hz and 4.92 × 10&#8722; 2 μW/mm3 · g2 · Hz, respectively.
URI
http://pubs.kist.re.kr/handle/201004/66946
ISSN
1057-7157
Appears in Collections:
KIST Publication > Article
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