3-dimentional imaging method for sample loading system in AirSEM

Title
3-dimentional imaging method for sample loading system in AirSEM
Authors
박민철곽기성찌바 예브헨셀로트킨 블라디슬라브
Keywords
AirSEM; Confocal; 3D imaging; nano
Issue Date
2018-02
Publisher
영상처리 및 이해에 관한 워크샵
URI
http://pubs.kist.re.kr/handle/201004/67356
Appears in Collections:
KIST Publication > Conference Paper
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