Deep-level defect distribution as a function of oxygen partial pressure in sputtered ZnO thin-film transistors

Title
Deep-level defect distribution as a function of oxygen partial pressure in sputtered ZnO thin-film transistors
Authors
김형석Jinhee ParkYou Seung RimChao LiMark GoorskyDwight Streit
Issue Date
2016-10
Publisher
Current applied physics
Citation
VOL 16, NO 10-1373
Abstract
Deep-level defect states in sputtered ZnO thin-film transistors were investigated as a function of oxygen partial pressure during sputtering growth. Photo-induced threshold voltage-shift measurements under monochromatic illumination were used to characterize the deep-level defect distribution. Intrinsically, the defect states of oxygen vacancies were ionized to V-o(+) and V-o(2+) while the photon energy was absorbed within the bandgap, resulting in the shift of threshold voltage. Extracted deep-level defect distribution from this shift of threshold voltage was clearly confirmed in the range of 1.8-2.1 eV below the conduction band minimum and this region was suppressed with increasing oxygen partial pressure. These deep-level defect states can have a detrimental effect on device performance, such as threshold voltage shift and photo-induced leakage current. The photo instability of the devices occurred under visible light due to the photo-ionization of deep-level trapped charges associated with oxygen vacancies.
URI
http://pubs.kist.re.kr/handle/201004/67379
ISSN
1567-1739
Appears in Collections:
KIST Publication > Article
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