Surface and local electronic structure modification of MgO film using Zn and Fe ion implantation

Title
Surface and local electronic structure modification of MgO film using Zn and Fe ion implantation
Authors
송종한임원철채근화이지혜씽 지텐드라이익재
Keywords
Implantation; Atomic force microscopy; Local electronic structure
Issue Date
2018-02
Publisher
Applied surface science
Citation
VOL 432-139
Abstract
Present work is motivated to investigate the surface and local electronic structure modifications of MgO films implanted with Zn and Fe ions. MgO film was deposited using radio frequency sputtering method. Atomic force microscopy measurements exhibit morphological changes associated with implantation. Implantation of Fe and Zn ions leads to the reduction of co-ordination geometry of Mg2+ ions in host lattice. The effect is dominant at bulk of film rather than surface as the large concentration of implanted ions resides inside bulk. Moreover, the evidences of interaction among implanted ions and oxygen are not being observed using near edge fine structure measurements.
URI
http://pubs.kist.re.kr/handle/201004/67938
ISSN
0169-4332
Appears in Collections:
KIST Publication > Article
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