Enhanced efficiency of crystalline Si solar cells based on kerfless-thin wafers with nanohole arrays

Title
Enhanced efficiency of crystalline Si solar cells based on kerfless-thin wafers with nanohole arrays
Authors
김원목송종한이택성박종극김인호정두석이도권김준곤최경진김혜연이현승석재권주병권
Keywords
Silicon solar cell; Proton implantation; Kerfless wafering; Nanostructure; Light trapping; Al back sruface field
Issue Date
2018-02
Publisher
Scientific Reports
Citation
VOL 8, NO 3504-12
Abstract
Several techniques have been proposed for kerfless wafering of thin Si wafers, which is one of the most essential techniques for reducing Si material loss in conventional wafering methods to lower cell cost. Proton induced exfoliation is one of promising kerfless techniques due to the simplicity of the process of implantation and cleaving. However, for application to high efficiency solar cells, it is necessary to cope with some problems such as implantation damage removal and texturing of (111) oriented wafers. This study analyzes the end-of-range defects at both kerfless and donor wafers and ion cutting sites. Thermal treatment and isotropic etching processes allow nearly complete removal of implantation damages in the cleaved-thin wafers. Combining laser interference lithography and a reactive ion etch process, a facile nanoscale texturing process for the kerfless thin wafers of a (111) crystal orientation has been developed. We demonstrate that the introduction of nanohole array textures with an optimal design and complete damage removal lead to an improved efficiency of 15.2% based on the kerfless wafer of a 48 μm thickness using the standard architecture of the Al back surface field.
URI
http://pubs.kist.re.kr/handle/201004/68101
ISSN
2045-2322
Appears in Collections:
KIST Publication > Article
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