Exploration of Si-doped SnO2 composition and properties of oxide/Ag/oxide multilayers prepared using continuous composition spread by sputtering

Title
Exploration of Si-doped SnO2 composition and properties of oxide/Ag/oxide multilayers prepared using continuous composition spread by sputtering
Authors
최지원임해나장주희
Keywords
Transparent conducting oxides; Si-doped SnO2/Ag/Si-doped SnO2; Thin films; Electrical properties; Optical properties; Radio-frequency magnetron sputtering; Continuous composition spread
Issue Date
2018-08
Publisher
Thin solid films
Citation
VOL 660-612
Abstract
Si-doped SnO2/Ag/Si-doped SnO2 multilayer thin films were fabricated on flexible substrates at room temperature for indium free transparent conducting electrode. The optimal composition of Si-doped SnO2 was found by investigating electrical properties of various composition deposited by off-axis RF magnetron sputtering continuous composition spread method. Si-doped SnO2 thin films have low resistivity (0.07 Omega.cm) at doping content of Si (0.14 wt%). Si-doped SnO2/Ag/Si-doped SnO2 multilayer thin films were fabricated using optimized composition deposited by on-axis RF and DC sputtering. The optimized Si-doped SnO2/Ag/Si-doped SnO2 multilayer thin film has resistivity of 9.1x10(-5) Omega.cm and 81% transmittance in the visible region (550 nm).
URI
http://pubs.kist.re.kr/handle/201004/68126
ISSN
0040-6090
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KIST Publication > Article
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