Analysis of Thin Film Parylene-Metal-Parylene Device Based on Mechanical Tensile Strength Measurement

Title
Analysis of Thin Film Parylene-Metal-Parylene Device Based on Mechanical Tensile Strength Measurement
Authors
김진석최원석석선호박형달김옥철
Keywords
FEM (Finite Element Method); Parylene; Neural Probe; Implantable
Issue Date
2019-05
Publisher
21th Edition of the Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP) 2019
URI
http://pubs.kist.re.kr/handle/201004/69425
ISSN
-
Appears in Collections:
KIST Publication > Conference Paper
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