Universal perpendicular orientation of block copolymer microdomains using a filtered plasma

Title
Universal perpendicular orientation of block copolymer microdomains using a filtered plasma
Authors
손정곤오진우고영표나윤서서효선이종찬염봉준차국헌Caroline A. Ross
Keywords
블록공중합체; 10나노 이하 패터닝; 유도자기조립; DSA; 나노구조 배향; 수직 배향
Issue Date
2019-07
Publisher
Nature Communications
Citation
VOL 10, NO 2912-8
URI
http://pubs.kist.re.kr/handle/201004/69557
ISSN
2041-1723
Appears in Collections:
KIST Publication > Article
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