Synthesis of Transition Metal Disulfides with Liquid Ammonium Sulfide as a Reliable Sulfur Precursor
- Synthesis of Transition Metal Disulfides with Liquid Ammonium Sulfide as a Reliable Sulfur Precursor
- 김수민; Soo Ho Choi; Chang Seok Oh; Stephen Boandoh; Woochul Yang; Ki Kang Kim
- Issue Date
- Applied Science and Convergence Technology
- VOL 28, NO 3-65
- We introduce liquid ammonium sulfide as a reliable and carbon-free sulfur precursor for synthesizing large-area transition metal disulfides (TMdS) in chemical vapor deposition. The flux of sulfur during TMdS growth is precisely controlled by passing a known amount of carrier gas through a bubbling system containing liquid ammonium sulfide. However, controlling the flux of sulfur through the conventional evaporation of sulfur powder using a heating belt remains a challenge. By achieving controllability of sulfur flux, we study growth kinetics such as nucleation density and growth rate. Furthermore, the continuous supply of the sulfur precursor results in the growth of a large-area monolayer and a few layers of MoS2 film. In addition, we present the feasibility of ammonium sulfide as an effective and clean precursor for the growth of a wide range of TMdS, thus enabling it to serve as a universal sulfur precursor.
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