Superhard SiC Thin Films with a Microstructure of Nanocolumnar Crystalline Grains and an Amorphous Intergranular Phase

Title
Superhard SiC Thin Films with a Microstructure of Nanocolumnar Crystalline Grains and an Amorphous Intergranular Phase
Authors
이욱성백영준박종극임관원심용섭허주열
Keywords
탄화규소박막; 초경도; 나노주상결정; 나노복합미세구조
Issue Date
2019-11
Publisher
Corrosion Science and Technology
Citation
VOL 18, NO 5-212
URI
http://pubs.kist.re.kr/handle/201004/70593
ISSN
1598-6462
Appears in Collections:
KIST Publication > Article
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