Investigation of phases and chemical states of tin titanate films grown by atomic layer deposition
- Investigation of phases and chemical states of tin titanate films grown by atomic layer deposition
- 원성옥; 김성근; 편정준; 이한솔; 정홍근; 백인환; Ga-Yeon Lee; Jeong Hwan Han; Taek-Mo Chung; Tae Joo Park
- atomic layer deposition; tin titanate; ferroelectric
- Issue Date
- Journal of vacuum science & technology. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society
- VOL 38, NO 1, 012404
- Although perovskite tin titanate (SnTiO3, STO) has been predicted to have ferroelectricity with a large spontaneous polarization, the implementation of metastable perovskite STO remains a great challenge. In this study, the atomic layer deposition of STO films was attempted using bis(1-dimethylamino-2-methyl-2-propoxy)tin(II) as the Sn source, titanium-tetrakis-isopropoxide as the Ti source, and water as the oxygen source. It was found that during the process, adsorption of both the precursors was enhanced on the heterogeneous reaction surface because of the correlation growth behavior. STO films remained amorphous below 250 °C. Furthermore, although the film was crystallized at 270 °C, the perovskite phase was not identified. Despite the use of the Sn precursor with Sn2+, Sn ions in all the films transformed into Sn4+. Although the postdeposition annealing process in a forming gas atmosphere was conducted for the perovskite conversion, the STO film transformed into Ti5Sn3, an intermetallic compound, at 500 °C.
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