Investigation of phases and chemical states of tin titanate films grown by atomic layer deposition

Title
Investigation of phases and chemical states of tin titanate films grown by atomic layer deposition
Authors
원성옥김성근편정준이한솔정홍근백인환Ga-Yeon LeeJeong Hwan HanTaek-Mo ChungTae Joo Park
Keywords
atomic layer deposition; tin titanate; ferroelectric
Issue Date
2020-03
Publisher
Journal of vacuum science & technology. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society
Citation
VOL 38, NO 1, 012404
Abstract
Although perovskite tin titanate (SnTiO3, STO) has been predicted to have ferroelectricity with a large spontaneous polarization, the implementation of metastable perovskite STO remains a great challenge. In this study, the atomic layer deposition of STO films was attempted using bis(1-dimethylamino-2-methyl-2-propoxy)tin(II) as the Sn source, titanium-tetrakis-isopropoxide as the Ti source, and water as the oxygen source. It was found that during the process, adsorption of both the precursors was enhanced on the heterogeneous reaction surface because of the correlation growth behavior. STO films remained amorphous below 250 °C. Furthermore, although the film was crystallized at 270 °C, the perovskite phase was not identified. Despite the use of the Sn precursor with Sn2+, Sn ions in all the films transformed into Sn4+. Although the postdeposition annealing process in a forming gas atmosphere was conducted for the perovskite conversion, the STO film transformed into Ti5Sn3, an intermetallic compound, at 500 °C.
URI
http://pubs.kist.re.kr/handle/201004/70843
ISSN
0734-2101
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KIST Publication > Article
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