Monolithically-Integrated Single-Photon Avalanche Diode in a Zero-Change Standard CMOS Process for Low-Cost and Low-Voltage LiDAR Application

Title
Monolithically-Integrated Single-Photon Avalanche Diode in a Zero-Change Standard CMOS Process for Low-Cost and Low-Voltage LiDAR Application
Authors
이명재Jinsoo RhimXiaoge ZengZhihong HuangSai Rahul ChalamalasettiMarco FiorentinoRaymond Beausoleil
Keywords
single photon avalanche diode; monolithic integration; zero-change standard CMOS technology
Issue Date
2019-06
Publisher
Instruments
Citation
VOL 3, NO 2-33-9
Abstract
We present a single-photon sensor based on the single-photon avalanche diode (SPAD) that is suitable for low-cost and low-voltage light detection and ranging (LiDAR) applications. It is implemented in a zero-change standard 0.18-μm complementary metal oxide semiconductor process at the minimum cost by excluding any additional processing step for customized doping profiles. The SPAD is based on circular shaped P+/N-well junction of 8-μm diameter, and it achieves low breakdown voltage below 10 V so that the operation voltage of the single-photon sensor can be minimized. The quenching and reset circuit is integrated monolithically to capture photon-generated output pulses for measurement. A complete characterization of our single-photon sensor is provided.
URI
http://pubs.kist.re.kr/handle/201004/70895
ISSN
2410-390X
Appears in Collections:
KIST Publication > Article
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