Selective Infiltration in Polymer Hybrid Thin Films as a Gas-Encapsulation Layer for Stretchable Electronics
- Selective Infiltration in Polymer Hybrid Thin Films as a Gas-Encapsulation Layer for Stretchable Electronics
- 조상호; 박진선; 윤홍로; M. Alam Khan; 성명모
- Issue Date
- ACS Applied Materials & Interfaces
- VOL 12, NO 7-8825
- Infiltration depth and water vapor transmission rate (WVTR) were explored in a variety of Al2O3-polymer hybrid layers as thin gas barrier films by filling the free volumes of polymers at the subsurface region with Al2O3 using atomic layer infiltration (ALI) method. Among all, the prepared Al2O3‒ PET, Al2O3‒ PI, Al2O3‒ Nylon 6 hybrid thin layers with the infiltration depth in the nanometer ranges showed extremely low WVTR values (< 10‒ 6 gm‒ 2day‒ 1) by Ca dot corrosion test. Furthermore, we observed a selective infiltration among the two polymers (PFA and PET) by a preferential growth of Al2O3 in PET polymer that might be based on effective functional group anchoring in the ALI process. Then, we demonstrated a novel strategy by employing such a selective infiltration procedure with encapsulating individual segments of 144 Ca dots by Al2O3-PET hybrid thin films on PFA polymer substrate, rather than wrapping the whole things together for the stretchable gas encapsulation film. Regardless of stretching, it showed extremely low WVTR (< 10-7 gm-2day-1) and is proposed as a highly promising hermetic sealing alternative in stretchable, flexible and foldable electronic display technologies.
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