Selective Infiltration in Polymer Hybrid Thin Films as a Gas-Encapsulation Layer for Stretchable Electronics

Title
Selective Infiltration in Polymer Hybrid Thin Films as a Gas-Encapsulation Layer for Stretchable Electronics
Authors
조상호박진선윤홍로M. Alam Khan성명모
Issue Date
2020-01
Publisher
ACS Applied Materials & Interfaces
Citation
VOL 12, NO 7-8825
Abstract
Infiltration depth and water vapor transmission rate (WVTR) were explored in a variety of Al2O3-polymer hybrid layers as thin gas barrier films by filling the free volumes of polymers at the subsurface region with Al2O3 using atomic layer infiltration (ALI) method. Among all, the prepared Al2O3&#8210; PET, Al2O3&#8210; PI, Al2O3&#8210; Nylon 6 hybrid thin layers with the infiltration depth in the nanometer ranges showed extremely low WVTR values (< 10&#8210; 6 gm&#8210; 2day&#8210; 1) by Ca dot corrosion test. Furthermore, we observed a selective infiltration among the two polymers (PFA and PET) by a preferential growth of Al2O3 in PET polymer that might be based on effective functional group anchoring in the ALI process. Then, we demonstrated a novel strategy by employing such a selective infiltration procedure with encapsulating individual segments of 144 Ca dots by Al2O3-PET hybrid thin films on PFA polymer substrate, rather than wrapping the whole things together for the stretchable gas encapsulation film. Regardless of stretching, it showed extremely low WVTR (< 10-7 gm-2day-1) and is proposed as a highly promising hermetic sealing alternative in stretchable, flexible and foldable electronic display technologies.
URI
http://pubs.kist.re.kr/handle/201004/70912
ISSN
1944-8244
Appears in Collections:
KIST Publication > Article
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