Selective grafting of polymer brushes for directed self-assembly of high-χ block copolymers

Title
Selective grafting of polymer brushes for directed self-assembly of high-χ block copolymers
Authors
고재현Ji Yeon KimQingjun ZhuNatsuko ItoRyuta MizuochiGregory BlachutJan DoiseStephen SirardChristopher J. EllisonNathaniel A. LyndC. Grant Willson
Keywords
Directed Self-assembly; Block Copolymers; Polymer Brush; Selective Grafting
Issue Date
2019-02
Publisher
2019 SPIE Advanced Lithography Conference
URI
http://pubs.kist.re.kr/handle/201004/70960
ISSN
-
Appears in Collections:
KIST Publication > Conference Paper
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