Graphene-based crack lithography for high-throughput fabrication of terahertz metamaterials

Title
Graphene-based crack lithography for high-throughput fabrication of terahertz metamaterials
Authors
서민아이상훈원세정정현준김다솜Do Van Lam김현돈김광섭이승모김대식이학주김재현
Issue Date
2020-03
Publisher
Carbon
Citation
VOL 158-512
Abstract
Terahertz (THz) nanoantennas have significant potential for versatile applications in THz spectroscopy because of their capability for strong electromagnetic field localization. Electron-beam lithography or focused ion beam machining is typically employed to fabricate nanoantenna structures. These nanolithography methods present limitations in the widespread utilization of THz nanoantennas because of their high cost and low productivity. In this work, we proposed graphene-based crack lithography as a high throughput fabrication method for nanoantenna structures. A double-layer graphene interface was introduced to enable independent control of the nanoantenna dimensions and provide graphene-based nanoantenna structures. We analyzed the underlying mechanism of graphene-based cracking and developed an analytical model governing the geometric parameters of the fabricated nanostructures. As a vital application of the fabricated nanoantenna structures, we demonstrated the highly sensitive detection of d-Glucose molecules. Graphene-based crack lithography can provide a cost-effective method for generating nanoantenna structures with the desired characteristics and can accelerate the development of practical applications of electromagnetic metamaterials.
URI
http://pubs.kist.re.kr/handle/201004/70973
ISSN
0008-6223
Appears in Collections:
KIST Publication > Article
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