On-chip Fabry-Perot interferometric sensors for micro-gas chromatography detection

Title
On-chip Fabry-Perot interferometric sensors for micro-gas chromatography detection
Authors
이원석Karthik ReddyYunbo GuoJing LiuMaung Kyaw Khaing OoaXudong Fan
Issue Date
2011-11
Publisher
Sensors and actuators. B, Chemical
Citation
VOL 159, NO 1-65
Abstract
We fabricated and characterized on-chip Fabry-Perot (FP) vapor sensors for the development of on-column micro-gas chromatography (mu GC) detectors. The FP sensors were made by coating a thin layer of polymer on a silicon wafer. The air-polymer and polymer-silicon interfaces form an FP cavity, whose resonance wavelengths change in response to the vapor absorption/desorption, thus allowing for rapid detection and quantification of vapors. For proof-of-concept, two polymers (PDMS and SU-8) were used independently and placed in an array in a microfluidic channel, and showed different sensitivities for different vapors. A sub-nano-gram detection limit and sub-second response time were achieved, representing orders of magnitude improvement over those previously reported. This on-chip design will enable the unprecedented integration of optical vapor sensors with mu GC systems.
URI
http://pubs.kist.re.kr/handle/201004/71101
ISSN
0925-4005
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KIST Publication > Article
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