Rapid, sensitive, and multiplexed on-chip optical sensors for micro-gas chromatography
- Rapid, sensitive, and multiplexed on-chip optical sensors for micro-gas chromatography
- 이원석; Karthik Reddy; Yunbo Guo; Jing Liu; Maung Kyaw Khaing Oo; Xudong Fan
- Issue Date
- Lab on a chip
- VOL 12, NO 5-905
- We developed and characterized a rapid, sensitive and integrated optical vapor sensor array for micro-gas chromatography (mGC) applications. The sensor is based on the Fabry-Perot (FP) interferometer formed by a micrometre-thin vapor-sensitive polymer layer coated on a silicon wafer. The thickness and the refractive index of the polymer vary in response to the vapor analyte, resulting in a change in the reflected intensity of the laser impinged on the sensor. In our study, four different polymers were coated on four wells pre-etched on a silicon wafer to form a spatially separated sensor array. A CMOS imager was employed to simultaneously monitor the polymers' response, thus enabling multiplexed detection of a vapor analyte passing through the GC column. A sub-second detection time was demonstrated. In addition, a sub-picogram detection limit was achieved, representing orders of magnitude improvement over the on-chip vapor sensors previously reported.
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