Hybrid Thin-Film Encapsulation for All-Solid-State Thin-Film Batteries

Title
Hybrid Thin-Film Encapsulation for All-Solid-State Thin-Film Batteries
Authors
최지원최원국이현석임근용김광범유재웅
Keywords
thin-film batteries; microbatteries; thin-film encapsulation; silicon oxynitride; parylene
Issue Date
2020-03
Publisher
ACS Applied Materials & Interfaces
Citation
VOL 12-11510
URI
http://pubs.kist.re.kr/handle/201004/71183
ISSN
1944-8244
Appears in Collections:
KIST Publication > Article
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