RF impedance measurements of DC atmospheric micro-discharges

Title
RF impedance measurements of DC atmospheric micro-discharges
Authors
정대환L.J. OverzetM.A. MandraM. GoecknerT. DufourR. DussartP. Lefaucheux
Issue Date
2010-10
Publisher
The European physical journal. D, Atomic, molecular, and optical physics
Citation
VOL 60-454
Abstract
The available diagnostics for atmospheric micro-plasmas remain limited and relatively complex to implement; so we present a radio-frequency technique for diagnosing a key parameter here. The technique allows one to estimate the dependencies of the electron density by measuring the RF-impedance of the micro-plasma and analyzing it with an appropriate equivalent circuit. This technique is inexpensive, can be used in real time and gives reasonable results for argon and helium DC micro-plasmas in holes over a wide pressure range. The electron density increases linearly with current in the expected range consistent with normal glow discharge behavior.
URI
http://pubs.kist.re.kr/handle/201004/72272
ISSN
1434-6060
Appears in Collections:
KIST Publication > Article
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