Biodegradable, flexible silicon nanomembranebased NOx gas sensor system with record-high performance for transient environmental monitors and medical implants

Title
Biodegradable, flexible silicon nanomembranebased NOx gas sensor system with record-high performance for transient environmental monitors and medical implants
Authors
강종윤고관진Soo Deok HanJeong-Ki KimJia ZhuWon Bae HanJinmook ChungSeung Min YangHuanyu ChengDong-Hwee KimSuk-Won Hwang
Issue Date
2020-11
Publisher
NPG Asia Materials
Citation
VOL 12, 71
Abstract
A novel transient electronics technology that is capable of completely dissolving or decomposing in certain conditions after a period of operation offers unprecedented opportunities for medical implants, environmental sensors, and other applications. Here, we describe a biodegradable, flexible silicon-based electronic system that detects NO species with a record-breaking sensitivity of 136 Rs (5 ppm, NO2) and 100-fold selectivity for NO species over other substances with a fast response (~30?s) and recovery (~60?s). The exceptional features primarily depend on not only materials, dimensions, and design layouts but also temperatures and electrical operations. Large-scale sensor arrays in a mechanically pliable configuration exhibit negligible deterioration in performance under various modes of applied loads, consistent with mechanics modeling. In vitro evaluations demonstrate the capability and stability of integrated NOx devices in severe wet environments for biomedical applications.
URI
http://pubs.kist.re.kr/handle/201004/72416
ISSN
1884-4049
Appears in Collections:
KIST Publication > Article
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