Plasma deposition of parylene-C film

Title
Plasma deposition of parylene-C film
Authors
강민정Zhiquan SOngJu-Hee ImHyuk KoJun-Hee ParkGa-Yeon LeeMoo-Hwan KimJae-Chul Pyun
Keywords
Parylene-C; Plasma; Thermal; Deposition; Instrumentation
Issue Date
2021-03
Publisher
Materials Today
Citation
VOL 26, NO 101834-101834
URI
http://pubs.kist.re.kr/handle/201004/73238
ISSN
1369-7021
Appears in Collections:
KIST Publication > Article
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