Copolymers of camphorsulfonyloxy-maleimide and t-BOC protected vinyllactams for applications as single-component resists

Title
Copolymers of camphorsulfonyloxy-maleimide and t-BOC protected vinyllactams for applications as single-component resists
Authors
안광덕김상태김진백정민호
Keywords
photochemical acid generation
Issue Date
1997-01
Publisher
Polymer bulletin
Citation
VOL 39, 423-430
URI
http://pubs.kist.re.kr/handle/201004/7604
Appears in Collections:
KIST Publication > Article
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