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분석 시스템을 설치 가능한 박막 증착 장치

Author

김인수; 김춘근; 이관일; 이원석; 강준현; 강진구; 강구민

Assignee

한국과학기술연구원

Regitration Date

2021-10-12

Registration No.

10-2314076

Application Date

2019-09-19

Application No.

10-2019-0115587

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/76123

Appears in Collections:

KIST Patent > Others

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