Fabrication and field emission study of gated diamondlike-carbon-coated silicon tips.
- Fabrication and field emission study of gated diamondlike-carbon-coated silicon tips.
- 이상조; 주병권; 이윤희; 오명환; 전동렬; C. G. Ko
- field emitter; carbon; electron field emission; oxidation; plasma CVD coatings; semiconductor technology; silicon; sputter etching; vacuum microelectronics
- Issue Date
- Technical digest of 9th international vacuum microelectronics conference, St. Petersburg, Russia.
- , 193-196
- Appears in Collections:
- KIST Publication > Conference Paper
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