Spectro-ellipsometric studies of diamond-like carbon films deposited by the plasma decomposition of hydrocarbons.

Title
Spectro-ellipsometric studies of diamond-like carbon films deposited by the plasma decomposition of hydrocarbons.
Authors
이광렬이성규이순일Soo-Ghee Oh
Keywords
박막
Issue Date
1996-01
Publisher
표면공학회지
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/7649
Appears in Collections:
KIST Publication > Article
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