Electrical characterization of Pt-SrBi2Ta2O9/Pt capacitors fabricated by the pulsed laser ablated deposition technique

Title
Electrical characterization of Pt-SrBi2Ta2O9/Pt capacitors fabricated by the pulsed laser ablated deposition technique
Authors
이전국정형진O. AucielloA.I. Kingon
Keywords
SBTO; PLD; ferroelectric
Issue Date
1996-01
Publisher
Journal of vacuum science & technology. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society
Citation
VOL 14, NO 3, 900-904
URI
http://pubs.kist.re.kr/handle/201004/7675
ISSN
0734-2101
Appears in Collections:
KIST Publication > Article
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