KIST Library Institutional Repository

반도체 메모리 소자용 금속 전극 제조방법

Author

편정준; 조철진; 김상태; 정두석; 김성근; 강종윤; 최지원; 김진상; 백승협

Assignee

한국과학기술연구원

Regitration Date

2018-08-28

Registration No.

10062699

Application Date

2017-07-13

Application No.

15/648770

Country

US

URI

https://pubs.kist.re.kr/handle/201004/76843

Appears in Collections:

KIST Patent > Others

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