박막 미세가공 방법 및 광전변환 모듈 구조

Author
정증현박종극이도권한승희김원목
Assignee
한국과학기술연구원
Regitration Date
2020-02-18
Registration No.
10,566,478
Application Date
2017-09-15
Application No.
15/705,342
Country
US
URI
https://pubs.kist.re.kr/handle/201004/76861
Appears in Collections:
KIST Patent > Others
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