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dc.contributor.author백영준-
dc.contributor.author이욱성-
dc.contributor.author박종극-
dc.date.accessioned2024-01-12T03:37:53Z-
dc.date.available2024-01-12T03:37:53Z-
dc.date.issued2015-12-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/77005-
dc.title나노크기의 주상입자 조직을 갖는 초경도 탄화규소 박막-
dc.typePatent-
dc.date.registration2015-12-01-
dc.date.application2014-11-20-
dc.identifier.patentRegistrationNumber10-1575103-
dc.identifier.patentApplicationNumber2014-0162457-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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